 
| Property | Ge | Si | GaAs | Diamond | SiC | 
| Group | IV | IV | III-V | IV | IV-IV | 
| Lattice constant [Å] | 5.64 | 5.43 | 5.63 | 3.57 | 3.08 | 
| Bandgap, Eg [eV] | 0.66 | 1.12 | 1.42 | 5.45 | 2.99 | 
| Recombination type | Indirect | Indirect | Direct | Indirect | Indirect | 
| Electron mobility, m n [cm2/(V*s)] | 3900 | 1500 | 8500 | 1900 | 400 | 
| Hole mobility, m p [cm2/(V*s)] | 1900 | 600 | 400 | 1600 | 50 | 
| Dielectric constant, e | 16.0 | 11.8 | 13.1 | 5.5 | 10.0 | 
| Electron saturation velocity, Vn(sat) [cm/s] | 6*106 | 1*107 | 1.2*107 | 1.5*107 | 2*107 | 
| Hole saturation velocity, Vp(sat) [cm/s] | 9*106 | 1*107 | 1.05*107 | 1*107 | |
| Electron effective mass | 1.1 | 0.068 | 0.57 | 0.45 | |
| Hole effective mass | 0.8 | 0.5 | 1.2 | 1.0 | |
| Property | Ge | Si | GaAs | Diamond | SiC | 
| Thermal conductivity [W/(cm*K)] | 0.64 | 1.41 | 0.455 | 20 | 4 | 
| Specific heat [J/(g*K)] | 0.70 | 0.35 | 0.52 | 0.65 | |
| Optical phonon energy [meV] | 63 | 35 | 163 | 100 | |
| Longitudinal phonon velocity [cm/s] | 9*105 | 5.2*105 | 1.8*106 | 1.3*106 | |
| Thermal expansion coefficient | 5.5*10-6 | 2.5*10-6 | 5.9*10-6 | 0.8*10-6 | 2.9*10-6 | 
| Debye temperature | 645 | 344 | 1860 | 1200 | |
| Intrinsic resistivity [W *cm] | 43 | 105 | 108 | >1015 | >1015 | 
| Breakdown field [V/cm] | ~105 | 3*105 | 3.5*105 | 1-20*106 | 1-5*106 | 
| Conduction band density of states [cm-3] | 2.8*1019 | 4.7*1017 | 1*1019 | 7*1018 | |
| Valence band density of states [cm-3] | 1.04*1019 | 7*1018 | 3*1019 | 2.5*1019 | |
| Property | Ge | Si | GaAs | Diamond | SiC | 
| Carrier lifetime, t [ns] | 2*105 | 104 (2.5*106) | ~10 | 0.2 | |
| Hardness [Kg/mm2] | 780 | 103 | 600 | 104 | |
| Melting point [° C] | 941 | 1420 | 1238 | 3800 |